Yogananthan Sanketh

Scholar9 ID | S9-042025-2611571

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Advancements in Atomic Layer Deposition Techniques for Ultra-Thin Gate Dielectrics in Nanoscale Semiconductor Devices

Journal: ISCSITR - International Journal of Engineering and Technology • March 2022

As semiconductor devices scale below 10 nm, the need for ultra-thin, high-quality gate dielectrics becomes increasingly critical to ensure performance and reliability. Atomic Layer Deposition (ALD) ha...

Atomic layer deposition Ultra-thin dielectrics Nanoscale devices Semiconductor manufacturing High-k materials

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