Reginald Tyrone

Scholar9 ID | S9-042025-2611520

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Benchmarking Classical and Deep Learning Approaches for Defect Detection in High-Resolution Wafer Inspection Imaging

Journal: QIT Press - International Journal of Computer Science • March 2023

High-resolution wafer inspection is a critical step in semiconductor manufacturing, directly impacting yield and reliability. This paper benchmarks classical image processing techniques against recent...

Wafer inspection · defect detection · deep learning · image processing · semiconductor manufacturing · convolutional neural networks

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Reginald Tyrone

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