Geordie Johnson

Scholar9 ID | S9-042025-2611530

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Anomaly Detection in Semiconductor Process Validation Using Unsupervised Learning and Generative Models

Journal: International Journal of Engineering and Technology Research and Development • July 2022

Semiconductor manufacturing is characterized by highly complex, multistage processes that demand stringent validation to maintain product quality and yield. As traditional supervised approaches requir...

Semiconductor manufacturing Process validation Anomaly detection Unsupervised learning Generative models Autoencoders Gans Clustering Process control Machine learning

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