IEEE Transactions on Semiconductor Manufacturing (ITSM)
Journal Descriptions
The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.
IEEE Transactions on Semiconductor Manufacturing (ITSM) is :-
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International, Peer-Reviewed, Open Access, Refereed, precision micropatterning, precise control of materials properties, ultraclean work environments, complex interactions of chemical, physical, electrical and mechanical processes , Online or Print , Quarterly Journal
- UGC Approved, ISSN Approved: P-ISSN P-ISSN: 0894-6507, E-ISSN: 1558-2345, Established: 1988, Impact Factor: 2.3
- Provides Crossref DOI
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Not indexed in Scopus, WoS, DOAJ, PubMed, UGC CARE